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Large-scale synthesis of uniform hexagonal boron nitride films by plasma-enhanced atomic layer deposition
Hexagonal boron nitride (h-BN) has been previously manufactured using mechanical exfoliation and chemical vapor deposition methods, which make the large-scale synthesis of uniform h-BN very challenging. In this study, we produced highly uniform and scalable h-BN films by plasma-enhanced atomic layer...
Zapisane w:
| Wydane w: | Sci Rep |
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| Główni autorzy: | , , , , , |
| Format: | Artigo |
| Język: | Inglês |
| Wydane: |
Nature Publishing Group
2017
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| Hasła przedmiotowe: | |
| Dostęp online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5214515/ https://ncbi.nlm.nih.gov/pubmed/28054603 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep40091 |
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