Large-scale synthesis of uniform hexagonal boron nitride films by plasma-enhanced atomic layer deposition

Hexagonal boron nitride (h-BN) has been previously manufactured using mechanical exfoliation and chemical vapor deposition methods, which make the large-scale synthesis of uniform h-BN very challenging. In this study, we produced highly uniform and scalable h-BN films by plasma-enhanced atomic layer...

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Bibliographic Details
Published in:Sci Rep
Main Authors: Park, Hamin, Kim, Tae Keun, Cho, Sung Woo, Jang, Hong Seok, Lee, Sang Ick, Choi, Sung-Yool
Format: Artigo
Language:Inglês
Published: Nature Publishing Group 2017
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Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC5214515/
https://ncbi.nlm.nih.gov/pubmed/28054603
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep40091
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