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Large-scale synthesis of uniform hexagonal boron nitride films by plasma-enhanced atomic layer deposition
Hexagonal boron nitride (h-BN) has been previously manufactured using mechanical exfoliation and chemical vapor deposition methods, which make the large-scale synthesis of uniform h-BN very challenging. In this study, we produced highly uniform and scalable h-BN films by plasma-enhanced atomic layer...
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| 發表在: | Sci Rep |
|---|---|
| Main Authors: | , , , , , |
| 格式: | Artigo |
| 語言: | Inglês |
| 出版: |
Nature Publishing Group
2017
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| 主題: | |
| 在線閱讀: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5214515/ https://ncbi.nlm.nih.gov/pubmed/28054603 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep40091 |
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