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Determination of electrostatic force and its characteristics based on phase difference by amplitude modulation atomic force microscopy
Electrostatic force measurement at the micro/nano scale is of great significance in science and engineering. In this paper, a reasonable way of applying voltage is put forward by taking an electrostatic chuck in a real integrated circuit manufacturing process as a sample, applying voltage in the pro...
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| Publicado no: | Nanoscale Res Lett |
|---|---|
| Main Authors: | , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer US
2016
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5153390/ https://ncbi.nlm.nih.gov/pubmed/27957727 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-016-1765-2 |
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