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Performance of Nano-Submicron-Stripe Pd Thin-Film Temperature Sensors
Dozens of small dual-beam thin-film temperature sensors with a total width down to 430 nm were fabricated and tested. The sensors were all made from 90-nm-thick Pd thin films, where the width of the narrow stripes was 70–100 nm and that of the wide ones was 210–800 nm. Two different calibration meth...
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| Publié dans: | Nanoscale Res Lett |
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| Auteurs principaux: | , , , , |
| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
Springer US
2016
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| Sujets: | |
| Accès en ligne: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4963350/ https://ncbi.nlm.nih.gov/pubmed/27465601 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-016-1565-8 |
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