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Performance of Nano-Submicron-Stripe Pd Thin-Film Temperature Sensors

Dozens of small dual-beam thin-film temperature sensors with a total width down to 430 nm were fabricated and tested. The sensors were all made from 90-nm-thick Pd thin films, where the width of the narrow stripes was 70–100 nm and that of the wide ones was 210–800 nm. Two different calibration meth...

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Bibliographic Details
Published in:Nanoscale Res Lett
Main Authors: Huo, Xiaoye, Xu, Jingjing, Wang, Zhenhai, Yang, Fan, Xu, Shengyong
Format: Artigo
Language:Inglês
Published: Springer US 2016
Subjects:
Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC4963350/
https://ncbi.nlm.nih.gov/pubmed/27465601
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-016-1565-8
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