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Treasure of the Past VII: Measurement of the Thickness and Refractive Index of Very Thin Films and the Optical Properties of Surfaces by Ellipsometry

The use of the ellipsometer for the measurement of the thickness and refractive index of very thin films is reviewed. The Poincaré sphere representation of the state of polarization of light is developed and used to describe the reflection process. Details of the operation of the ellipsometer are ex...

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Vydáno v:J Res Natl Inst Stand Technol
Hlavní autoři: McCrackin, Frank L., Passaglia, Elio, Stromberg, Robert R., Steinberg, Harold L.
Médium: Artigo
Jazyk:Inglês
Vydáno: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 2001
Témata:
On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC4863837/
https://ncbi.nlm.nih.gov/pubmed/27500037
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.6028/jres.106.025
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