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Treasure of the Past VII: Measurement of the Thickness and Refractive Index of Very Thin Films and the Optical Properties of Surfaces by Ellipsometry

The use of the ellipsometer for the measurement of the thickness and refractive index of very thin films is reviewed. The Poincaré sphere representation of the state of polarization of light is developed and used to describe the reflection process. Details of the operation of the ellipsometer are ex...

詳細記述

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書誌詳細
出版年:J Res Natl Inst Stand Technol
主要な著者: McCrackin, Frank L., Passaglia, Elio, Stromberg, Robert R., Steinberg, Harold L.
フォーマット: Artigo
言語:Inglês
出版事項: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 2001
主題:
オンライン・アクセス:https://ncbi.nlm.nih.gov/pmc/articles/PMC4863837/
https://ncbi.nlm.nih.gov/pubmed/27500037
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.6028/jres.106.025
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