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Tip Characterization Method using Multi-feature Characterizer for CD-AFM
In atomic force microscopy (AFM) metrology, the tip is a key source of uncertainty. Images taken with an AFM show a change in feature width and shape that depends on tip geometry. This geometric dilation is more pronounced when measuring features with high aspect ratios, and makes it difficult to ob...
שמור ב:
| הוצא לאור ב: | Ultramicroscopy |
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| Main Authors: | , , , , , , |
| פורמט: | Artigo |
| שפה: | Inglês |
| יצא לאור: |
2015
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| נושאים: | |
| גישה מקוונת: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4803071/ https://ncbi.nlm.nih.gov/pubmed/26720439 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.ultramic.2015.12.003 |
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