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Tip Characterization Method using Multi-feature Characterizer for CD-AFM
In atomic force microscopy (AFM) metrology, the tip is a key source of uncertainty. Images taken with an AFM show a change in feature width and shape that depends on tip geometry. This geometric dilation is more pronounced when measuring features with high aspect ratios, and makes it difficult to ob...
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| Publié dans: | Ultramicroscopy |
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| Auteurs principaux: | , , , , , , |
| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
2015
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| Sujets: | |
| Accès en ligne: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4803071/ https://ncbi.nlm.nih.gov/pubmed/26720439 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.ultramic.2015.12.003 |
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