Direct Deposition of Uniform High-κ Dielectrics on Graphene

High quality High-κ dielectrics on graphene were achieved by atomic layer deposition directly using remote oxygen plasma surface pretreatment. The uniform coverage on graphene is illustrated by atomic force microscopy and confirmed by high resolution transmission microscopy. The possible surface lat...

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Bibliographic Details
Published in:Sci Rep
Main Authors: Zhou, Peng, Yang, Songbo, Sun, Qingqing, Chen, Lin, Wang, Pengfei, Ding, Shijin, Zhang, David Wei
Format: Artigo
Language:Inglês
Published: Nature Publishing Group 2014
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Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC4650933/
https://ncbi.nlm.nih.gov/pubmed/25264077
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep06448
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