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Direct Deposition of Uniform High-κ Dielectrics on Graphene
High quality High-κ dielectrics on graphene were achieved by atomic layer deposition directly using remote oxygen plasma surface pretreatment. The uniform coverage on graphene is illustrated by atomic force microscopy and confirmed by high resolution transmission microscopy. The possible surface lat...
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| Publicado no: | Sci Rep |
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| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Publishing Group
2014
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4650933/ https://ncbi.nlm.nih.gov/pubmed/25264077 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep06448 |
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