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Large-Area Growth of Uniform Single-Layer MoS(2) Thin Films by Chemical Vapor Deposition
We report the largest-size thin films of uniform single-layer MoS(2) on sapphire substrates grown by chemical vapor deposition based on the reaction of gaseous MoO(3) and S evaporated from solid sources. The as-grown thin films of single-layer MoS(2) were continuous and uniform in thickness for more...
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| Veröffentlicht in: | Nanoscale Res Lett |
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| Hauptverfasser: | , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Springer US
2015
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4595407/ https://ncbi.nlm.nih.gov/pubmed/26439617 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-015-1094-x |
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