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Two-Step Growth of Uniform Monolayer MoS(2) Nanosheets by Metal–Organic Chemical Vapor Deposition
[Image: see text] To achieve large area growth of transition metal dichalcogenides of uniform monolayer thickness, we demonstrate metal–organic chemical vapor deposition (MOCVD) growth under low pressure followed by a high-temperature sulfurization process under atmospheric pressure (AP). Following...
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| הוצא לאור ב: | ACS Omega |
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| Main Authors: | , , , , , , , |
| פורמט: | Artigo |
| שפה: | Inglês |
| יצא לאור: |
American Chemical Society
2021
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| גישה מקוונת: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8153749/ https://ncbi.nlm.nih.gov/pubmed/34056187 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acsomega.1c00727 |
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