Two-Step Growth of Uniform Monolayer MoS(2) Nanosheets by Metal–Organic Chemical Vapor Deposition

[Image: see text] To achieve large area growth of transition metal dichalcogenides of uniform monolayer thickness, we demonstrate metal–organic chemical vapor deposition (MOCVD) growth under low pressure followed by a high-temperature sulfurization process under atmospheric pressure (AP). Following...

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發表在:ACS Omega
Main Authors: Chowdhury, Sayema, Roy, Anupam, Liu, Chison, Alam, Md Hasibul, Ghosh, Rudresh, Chou, Harry, Akinwande, Deji, Banerjee, Sanjay K.
格式: Artigo
語言:Inglês
出版: American Chemical Society 2021
在線閱讀:https://ncbi.nlm.nih.gov/pmc/articles/PMC8153749/
https://ncbi.nlm.nih.gov/pubmed/34056187
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acsomega.1c00727
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