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Large-Area Growth of Uniform Single-Layer MoS(2) Thin Films by Chemical Vapor Deposition

We report the largest-size thin films of uniform single-layer MoS(2) on sapphire substrates grown by chemical vapor deposition based on the reaction of gaseous MoO(3) and S evaporated from solid sources. The as-grown thin films of single-layer MoS(2) were continuous and uniform in thickness for more...

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Detalhes bibliográficos
Publicado no:Nanoscale Res Lett
Main Authors: Baek, Seung Hyun, Choi, Yura, Choi, Woong
Formato: Artigo
Idioma:Inglês
Publicado em: Springer US 2015
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4595407/
https://ncbi.nlm.nih.gov/pubmed/26439617
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-015-1094-x
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