Llwytho...
Direct Growth and Controlled Coalescence of Thick AlN Template on Micro-circle Patterned Si Substrate
High-density micro-circle patterned Si substrates were successfully fabricated for the direct overgrowth of thick AlN templates by using NH(3) pulsed-flow multilayer AlN growth and epitaxial lateral overgrowth techniques. The experimental results show that an 8-μm-thick AlN template was grown at a v...
Wedi'i Gadw mewn:
| Cyhoeddwyd yn: | Sci Rep |
|---|---|
| Prif Awduron: | , , , , , |
| Fformat: | Artigo |
| Iaith: | Inglês |
| Cyhoeddwyd: |
Nature Publishing Group
2015
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| Pynciau: | |
| Mynediad Ar-lein: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4593966/ https://ncbi.nlm.nih.gov/pubmed/26439169 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep14734 |
| Tagiau: |
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