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MEMS Young’s Modulus and Step Height Measurements With Round Robin Results
This paper presents the results of a microelectromechanical systems (MEMS) Young’s modulus and step height round robin experiment, completed in April 2009, which compares Young’s modulus and step height measurement results at a number of laboratories. The purpose of the round robin was to provide da...
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| Publicado no: | J Res Natl Inst Stand Technol |
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| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
2010
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4548872/ https://ncbi.nlm.nih.gov/pubmed/27134790 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.6028/jres.115.023 |
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