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A Simple Extraction Method of Young’s Modulus for Multilayer Films in MEMS Applications
Based on the first resonance frequency measurement of multilayer beams, a simple extraction method has been developed to extract the Young’s modulus of individual layers. To verify this method, the double-layer cantilever, as a typical example, is analyzed to simplify the situation and finite elemen...
Guardat en:
| Publicat a: | Micromachines (Basel) |
|---|---|
| Autors principals: | , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI
2017
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6190058/ https://ncbi.nlm.nih.gov/pubmed/30400391 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi8070201 |
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