Marshall, J., Allen, R. A., McGray, C. D., & Geist, J. (2010). MEMS Young’s Modulus and Step Height Measurements With Round Robin Results. J Res Natl Inst Stand Technol.
Stile di citazione ChicagoMarshall, Janet, Richard A. Allen, Craig D. McGray, e Jon Geist. "MEMS Young’s Modulus and Step Height Measurements With Round Robin Results." J Res Natl Inst Stand Technol 2010.
Citazione MLAMarshall, Janet, Richard A. Allen, Craig D. McGray, e Jon Geist. "MEMS Young’s Modulus and Step Height Measurements With Round Robin Results." J Res Natl Inst Stand Technol 2010.
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