ロード中...
Particle Tracking of Microelectromechanical System Performance and Reliability
Microelectromechanical systems (MEMS) that require contact of moving parts to implement complex functions exhibit limits to their performance and reliability. Here, we advance our particle tracking method to measure MEMS motion in operando at nanometer, microradian, and millisecond scales. We test a...
保存先:
| 出版年: | J Microelectromech Syst |
|---|---|
| 主要な著者: | , , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
2018
|
| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6512989/ https://ncbi.nlm.nih.gov/pubmed/31093003 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/JMEMS.2018.2874771 |
| タグ: |
タグ追加
タグなし, このレコードへの初めてのタグを付けませんか!
|