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Particle Tracking of Microelectromechanical System Performance and Reliability
Microelectromechanical systems (MEMS) that require contact of moving parts to implement complex functions exhibit limits to their performance and reliability. Here, we advance our particle tracking method to measure MEMS motion in operando at nanometer, microradian, and millisecond scales. We test a...
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| Gepubliceerd in: | J Microelectromech Syst |
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| Hoofdauteurs: | , , , |
| Formaat: | Artigo |
| Taal: | Inglês |
| Gepubliceerd in: |
2018
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| Onderwerpen: | |
| Online toegang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6512989/ https://ncbi.nlm.nih.gov/pubmed/31093003 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/JMEMS.2018.2874771 |
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