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Nanoscale Nitrogen Doping in Silicon by Self-Assembled Monolayers
This Report presents a nitrogen-doping method by chemically forming self-assembled monolayers on silicon. Van der Pauw technique, secondary-ion mass spectroscopy and low temperature Hall effect measurements are employed to characterize the nitrogen dopants. The experimental data show that the diffus...
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| Udgivet i: | Sci Rep |
|---|---|
| Main Authors: | , , , , , , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
Nature Publishing Group
2015
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4521158/ https://ncbi.nlm.nih.gov/pubmed/26227342 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep12641 |
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