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Measuring electro-mechanical properties of thin films on polymer substrates

In order to advance flexible electronic technologies it is important to study the electrical properties of thin metal films on polymer substrates under mechanical load. At the same time, the observation of film deformation and fracture as well as the stresses that are present in the films during str...

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Detalhes bibliográficos
Publicado no:Microelectron Eng
Main Authors: Cordill, Megan J., Glushko, O., Kreith, J., Marx, V.M., Kirchlechner, C.
Formato: Artigo
Idioma:Inglês
Publicado em: Elsevier 2015
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4456064/
https://ncbi.nlm.nih.gov/pubmed/26082564
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.mee.2014.08.002
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