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Measuring electro-mechanical properties of thin films on polymer substrates
In order to advance flexible electronic technologies it is important to study the electrical properties of thin metal films on polymer substrates under mechanical load. At the same time, the observation of film deformation and fracture as well as the stresses that are present in the films during str...
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| Udgivet i: | Microelectron Eng |
|---|---|
| Main Authors: | , , , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
Elsevier
2015
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4456064/ https://ncbi.nlm.nih.gov/pubmed/26082564 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.mee.2014.08.002 |
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