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The reason why thin-film silicon grows layer by layer in plasma-enhanced chemical vapor deposition

Thin-film Si grows layer by layer on Si(001)-(2 × 1):H in plasma-enhanced chemical vapor deposition. Here we investigate the reason why this occurs by using quantum chemical molecular dynamics and density functional theory calculations. We propose a dangling bond (DB) diffusion model as an alternati...

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Bibliografiske detaljer
Udgivet i:Sci Rep
Main Authors: Kuwahara, Takuya, Ito, Hiroshi, Kawaguchi, Kentaro, Higuchi, Yuji, Ozawa, Nobuki, Kubo, Momoji
Format: Artigo
Sprog:Inglês
Udgivet: Nature Publishing Group 2015
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC4360731/
https://ncbi.nlm.nih.gov/pubmed/25772469
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep09052
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