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Preferentially oriented BaTiO(3) thin films deposited on silicon with thin intermediate buffer layers
Barium titanate (BaTiO(3)) thin films are prepared by conventional 2-methoxy ethanol-based chemical solution deposition. We report highly c-axis-oriented BaTiO(3) thin films grown on silicon substrates, coated with a lanthanum oxynitrate buffer layer of 8.9 nm. The influence of the intermediate buff...
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| Main Authors: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2013
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3579712/ https://ncbi.nlm.nih.gov/pubmed/23391429 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-8-62 |
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