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Preferentially oriented BaTiO(3) thin films deposited on silicon with thin intermediate buffer layers

Barium titanate (BaTiO(3)) thin films are prepared by conventional 2-methoxy ethanol-based chemical solution deposition. We report highly c-axis-oriented BaTiO(3) thin films grown on silicon substrates, coated with a lanthanum oxynitrate buffer layer of 8.9 nm. The influence of the intermediate buff...

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Библиографические подробности
Главные авторы: George, John P, Beeckman, Jeroen, Woestenborghs, Wouter, Smet, Philippe F, Bogaerts, Wim, Neyts, Kristiaan
Формат: Artigo
Язык:Inglês
Опубликовано: Springer 2013
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Online-ссылка:https://ncbi.nlm.nih.gov/pmc/articles/PMC3579712/
https://ncbi.nlm.nih.gov/pubmed/23391429
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-8-62
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