Lataa...

Effects of starting powder and thermal treatment on the aerosol deposited BaTiO(3) thin films toward less leakage currents

To prepare high-density integrated capacitors with low leakage currents, 0.2-μm-thick BaTiO(3) thin films were successfully deposited on integrated semiconductor substrates at room temperature by the aerosol deposition (AD) method. In this study, the effects of starting powder size were considered i...

Täydet tiedot

Tallennettuna:
Bibliografiset tiedot
Päätekijät: Yao, Zhao, Wang, Cong, Li, Yang, Kim, Hong-Ki, Kim, Nam-Young
Aineistotyyppi: Artigo
Kieli:Inglês
Julkaistu: Springer 2014
Aiheet:
Linkit:https://ncbi.nlm.nih.gov/pmc/articles/PMC4158356/
https://ncbi.nlm.nih.gov/pubmed/25246860
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-9-435
Tagit: Lisää tagi
Ei tageja, Lisää ensimmäinen tagi!