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Formation of nanostructured silicon surfaces by stain etching
In this work, we report the fabrication of ordered silicon structures by chemical etching of silicon in vanadium oxide (V(2)O(5))/hydrofluoric acid (HF) solution. The effects of the different etching parameters including the solution concentration, temperature, and the presence of metal catalyst fil...
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| Publicado no: | Nanoscale Res Lett |
|---|---|
| Main Authors: | , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2014
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4242786/ https://ncbi.nlm.nih.gov/pubmed/25435830 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-9-482 |
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