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Macropore formation in p-type silicon: toward the modeling of morphology

The formation of macropores in silicon during electrochemical etching processes has attracted much interest. Experimental evidences indicate that charge transport in silicon and in the electrolyte should realistically be taken into account in order to be able to describe the macropore morphology. Ho...

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Bibliografische gegevens
Hoofdauteurs: Slimani, Amel, Iratni, Aicha, Henry, Hervé, Plapp, Mathis, Chazalviel, Jean-Noël, Ozanam, François, Gabouze, Noureddine
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: Springer 2014
Onderwerpen:
Online toegang:https://ncbi.nlm.nih.gov/pmc/articles/PMC4212238/
https://ncbi.nlm.nih.gov/pubmed/25386103
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-9-585
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