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Metal electrode integration on macroporous silicon: pore distribution and morphology
In this work, a new approach for the one-step integration of interdigitated electrodes on macroporous silicon substrates is presented. Titanium/gold interdigitated electrodes are used to pattern p-type silicon substrates prior the anodization in an organic electrolyte. The electrolyte characteristic...
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| Main Authors: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2012
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3462733/ https://ncbi.nlm.nih.gov/pubmed/22799456 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-395 |
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