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Competitive growth mechanisms of AlN on Si (111) by MOVPE

To improve the growth rate and crystal quality of AlN, the competitive growth mechanisms of AlN under different parameters were studied. The mass transport limited mechanism was competed with the gas-phase parasitic reaction and became dominated at low reactor pressure. The mechanism of strain relax...

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Главные авторы: Feng, Yuxia, Wei, Hongyuan, Yang, Shaoyan, Chen, Zhen, Wang, Lianshan, Kong, Susu, Zhao, Guijuan, Liu, Xianglin
Формат: Artigo
Язык:Inglês
Опубликовано: Nature Publishing Group 2014
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Online-ссылка:https://ncbi.nlm.nih.gov/pmc/articles/PMC4166946/
https://ncbi.nlm.nih.gov/pubmed/25231628
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep06416
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