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A review of roll-to-roll nanoimprint lithography

Since its introduction in 1995, nanoimprint lithography has been demonstrated in many researches as a simple, low-cost, and high-throughput process for replicating micro- and nanoscale patterns. Due to its advantages, the nanoimprint lithography method has been rapidly developed over the years as a...

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Autors principals: Kooy, Nazrin, Mohamed, Khairudin, Pin, Lee Tze, Guan, Ooi Su
Format: Artigo
Idioma:Inglês
Publicat: Springer 2014
Matèries:
Accés en línia:https://ncbi.nlm.nih.gov/pmc/articles/PMC4079920/
https://ncbi.nlm.nih.gov/pubmed/25024682
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-9-320
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