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Metal hierarchical patterning by direct nanoimprint lithography

Three-dimensional hierarchical patterning of metals is of paramount importance in diverse fields involving photonics, controlling surface wettability and wearable electronics. Conventionally, this type of structuring is tedious and usually involves layer-by-layer lithographic patterning. Here, we de...

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Detalhes bibliográficos
Main Authors: Radha, Boya, Lim, Su Hui, Saifullah, Mohammad S. M., Kulkarni, Giridhar U.
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group 2013
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3584315/
https://ncbi.nlm.nih.gov/pubmed/23446801
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep01078
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