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A review of roll-to-roll nanoimprint lithography
Since its introduction in 1995, nanoimprint lithography has been demonstrated in many researches as a simple, low-cost, and high-throughput process for replicating micro- and nanoscale patterns. Due to its advantages, the nanoimprint lithography method has been rapidly developed over the years as a...
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| Main Authors: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2014
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4079920/ https://ncbi.nlm.nih.gov/pubmed/25024682 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-9-320 |
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