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Thermally controlled widening of droplet etched nanoholes
We describe a method to control the shape of nanoholes in GaAs (001) which combines the technique of local droplet etching using Ga droplets with long-time thermal annealing. The cone-like shape of inverted nanoholes formed by droplet etching is transformed during long-time annealing into widened ho...
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| 主要な著者: | , , , |
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| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
Springer
2014
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4053582/ https://ncbi.nlm.nih.gov/pubmed/24948902 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-9-285 |
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