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Fabrication of nanochannels with ladder nanostructure at the bottom using AFM nanoscratching method
This letter presents a novel atomic force microscopy (AFM)-based nanomanufacturing method combining the tip scanning with the high-precision stage movement to fabricate nanochannels with ladder nanostructure at the bottom by continuous scanning with a fixed scan size. Different structures can be obt...
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| Autori principali: | , , , , , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Springer
2014
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4039066/ https://ncbi.nlm.nih.gov/pubmed/24940171 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-9-212 |
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