An Integrated Thermal Compensation System for MEMS Inertial Sensors

An active thermal compensation system for a low temperature-bias-drift (TBD) MEMS-based gyroscope is proposed in this study. First, a micro-gyroscope is fabricated by a high-aspect-ratio silicon-on-glass (SOG) process and vacuum packaged by glass frit bonding. Moreover, a drive/readout ASIC, impleme...

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Bibliografiske detaljer
Main Authors: Chiu, Sheng-Ren, Teng, Li-Tao, Chao, Jen-Wei, Sue, Chung-Yang, Lin, Chih-Hsiou, Chen, Hong-Ren, Su, Yan-Kuin
Format: Artigo
Sprog:Inglês
Udgivet: MDPI 2014
Fag:
Article
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC4003944/
https://ncbi.nlm.nih.gov/pubmed/24599191
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s140304290
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