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High Dynamic Micro Vibrator with Integrated Optical Displacement Detector for In-Situ Self-Calibration of MEMS Inertial Sensors

The scale factor drifts and other long-term instability drifts of Micro-Electro-Mechanical System (MEMS) inertial sensors are the main contributors of the position and orientation errors in high dynamic environments. In this paper, a novel high dynamic micro vibrator, which could provide high accele...

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Detalhes bibliográficos
Publicado no:Sensors (Basel)
Main Authors: Du, Yi-Jia, Yang, Ting-Ting, Gong, Dong-Dong, Wang, Yi-Cheng, Sun, Xiang-Yu, Qin, Feng, Dai, Gang
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2018
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6068876/
https://ncbi.nlm.nih.gov/pubmed/29954126
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18072055
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