High Dynamic Micro Vibrator with Integrated Optical Displacement Detector for In-Situ Self-Calibration of MEMS Inertial Sensors

Por Du, Yi-Jia, Yang, Ting-Ting, Gong, Dong-Dong, Wang, Yi-Cheng, Sun, Xiang-Yu, Qin, Feng, Dai, Gang
Publicado no Sensors (Basel) (2018)