Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy

We present a design of a nanometrology measuring setup which is a part of the national standard instrumentation for nanometrology operated by the Czech Metrology Institute (CMI) in Brno, Czech Republic. The system employs a full six-axis interferometric position measurement of the sample holder cons...

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Detaylı Bibliyografya
Asıl Yazarlar: Lazar, Josef, Klapetek, Petr, Valtr, Miroslav, Hrabina, Jan, Buchta, Zdenek, Cip, Onrej, Cizek, Martin, Oulehla, Jindrich, Sery, Mojmir
Materyal Türü: Artigo
Dil:Inglês
Baskı/Yayın Bilgisi: Molecular Diversity Preservation International (MDPI) 2014
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Article
Online Erişim:https://ncbi.nlm.nih.gov/pmc/articles/PMC3926591/
https://ncbi.nlm.nih.gov/pubmed/24451463
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s140100877
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