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Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy
We present a design of a nanometrology measuring setup which is a part of the national standard instrumentation for nanometrology operated by the Czech Metrology Institute (CMI) in Brno, Czech Republic. The system employs a full six-axis interferometric position measurement of the sample holder cons...
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| Main Authors: | , , , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Molecular Diversity Preservation International (MDPI)
2014
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3926591/ https://ncbi.nlm.nih.gov/pubmed/24451463 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s140100877 |
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