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Modeling and Fabrication of Micro FET Pressure Sensor with Circuits

This paper presents the simulation, fabrication and characterization of a micro FET (field effect transistor) pressure sensor with readout circuits. The pressure sensor includes 16 sensing cells in parallel. Each sensing cell that is circular shape is composed of an MOS (metal oxide semiconductor) a...

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Bibliografiske detaljer
Main Authors: Dai, Ching-Liang, Tai, Yao-Wei, Kao, Pin-Hsu
Format: Artigo
Sprog:Inglês
Udgivet: Molecular Diversity Preservation International (MDPI) 2007
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC3841901/
https://ncbi.nlm.nih.gov/pubmed/28903300
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