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Reliability of a MEMS Actuator Improved by Spring Corner Designs and Reshaped Driving Waveforms

In this paper, we report spring corner designs and driving waveforms to improve the reliability for a MEMS (Micro-Electro-Mechanical System) actuator. In order to prevent the stiction problems, no stopper or damping absorber is adopted. Therefore, an actuator could travel long distance by electromag...

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Detalhes bibliográficos
Main Authors: Hsieh, Hsin-Ta, Su, Guo-Dung John
Formato: Artigo
Idioma:Inglês
Publicado em: Molecular Diversity Preservation International (MDPI) 2007
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3841842/
https://ncbi.nlm.nih.gov/pubmed/28903193
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