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Position Estimator Design for a MEMS Top-Drive Electrostatic Rotary Actuator

The capacitance and rotor angle of a MEMS top-drive electrostatic rotary actuator do not have a linear relationship due to the non-ignorable fringe effect and low aspect ratio of the electrodes. Therefore, the position estimation is not as straightforward as that for a comb-drive linear actuator or...

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Bibliografiske detaljer
Udgivet i:Sensors (Basel)
Main Authors: Woo, Jemin, Hahn, Bongsu, Ahn, Changsun
Format: Artigo
Sprog:Inglês
Udgivet: MDPI 2020
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC7762984/
https://ncbi.nlm.nih.gov/pubmed/33321872
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20247081
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