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Position Estimator Design for a MEMS Top-Drive Electrostatic Rotary Actuator
The capacitance and rotor angle of a MEMS top-drive electrostatic rotary actuator do not have a linear relationship due to the non-ignorable fringe effect and low aspect ratio of the electrodes. Therefore, the position estimation is not as straightforward as that for a comb-drive linear actuator or...
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| Publicado no: | Sensors (Basel) |
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| Main Authors: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7762984/ https://ncbi.nlm.nih.gov/pubmed/33321872 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20247081 |
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