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Low-Actuation Voltage MEMS Digital-to-Analog Converter with Parylene Spring Structures
We propose an electrostatically-actuated microelectromechanical digital-to-analog converter (M-DAC) device with low actuation voltage. The spring structures of the silicon-based M-DAC device were monolithically fabricated using parylene-C. Because the Young’s modulus of parylene-C is considerably lo...
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| Опубликовано в: : | Sensors (Basel) |
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| Главные авторы: | , , , , |
| Формат: | Artigo |
| Язык: | Inglês |
| Опубликовано: |
MDPI
2015
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| Предметы: | |
| Online-ссылка: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4610465/ https://ncbi.nlm.nih.gov/pubmed/26343682 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s150921567 |
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