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Maskless and low-destructive nanofabrication on quartz by friction-induced selective etching
A low-destructive friction-induced nanofabrication method is proposed to produce three-dimensional nanostructures on a quartz surface. Without any template, nanofabrication can be achieved by low-destructive scanning on a target area and post-etching in a KOH solution. Various nanostructures, such a...
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| Main Authors: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
Springer
2013
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3620578/ https://ncbi.nlm.nih.gov/pubmed/23531381 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-8-140 |
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