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Scanning X-ray nanodiffraction: from the experimental approach towards spatially resolved scattering simulations
An enhancement on the method of X-ray diffraction simulations for applications using nanofocused hard X-ray beams is presented. We combine finite element method, kinematical scattering calculations, and a spot profile of the X-ray beam to simulate the diffraction of definite parts of semiconductor n...
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| Auteurs principaux: | , , , , , , |
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| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
Springer
2012
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| Sujets: | |
| Accès en ligne: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3583809/ https://ncbi.nlm.nih.gov/pubmed/23039065 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-553 |
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