Scanning X-ray nanodiffraction: from the experimental approach towards spatially resolved scattering simulations

An enhancement on the method of X-ray diffraction simulations for applications using nanofocused hard X-ray beams is presented. We combine finite element method, kinematical scattering calculations, and a spot profile of the X-ray beam to simulate the diffraction of definite parts of semiconductor n...

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Bibliografiske detaljer
Main Authors: Dubslaff, Martin, Hanke, Michael, Patommel, Jens, Hoppe, Robert, Schroer, Christian G, Schöder, Sebastian, Burghammer, Manfred
Format: Artigo
Sprog:Inglês
Udgivet: Springer 2012
Fag:
Nano Express
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC3583809/
https://ncbi.nlm.nih.gov/pubmed/23039065
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-553
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