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Ordered arrays of nanoporous silicon nanopillars and silicon nanopillars with nanoporous shells
The fabrication of ordered arrays of nanoporous Si nanopillars with and without nanoporous base and ordered arrays of Si nanopillars with nanoporous shells are presented. The fabrication route is using a combination of substrate conformal imprint lithography and metal-assisted chemical etching. The...
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| Main Authors: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2013
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3570473/ https://ncbi.nlm.nih.gov/pubmed/23336430 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-8-42 |
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