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The fabrication of large-scale sub-10-nm core-shell silicon nanowire arrays

A combination of template-assisted metal catalytic etching and self-limiting oxidation has been successfully implemented to yield core-shell silicon nanowire arrays with inner diameter down to sub-10 nm. The diameter of the polystyrene spheres after reactive ion etching and the thickness of the depo...

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Autors principals: Su, Shiming, Lin, Linhan, Li, Zhengcao, Feng, Jiayou, Zhang, Zhengjun
Format: Artigo
Idioma:Inglês
Publicat: Springer 2013
Matèries:
Accés en línia:https://ncbi.nlm.nih.gov/pmc/articles/PMC3852571/
https://ncbi.nlm.nih.gov/pubmed/24083345
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-8-405
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