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In situ-grown hexagonal silicon nanocrystals in silicon carbide-based films
Silicon nanocrystals (Si-NCs) were grown in situ in carbide-based film using a plasma-enhanced chemical vapor deposition method. High-resolution transmission electron microscopy indicates that these nanocrystallites were embedded in an amorphous silicon carbide-based matrix. Electron diffraction pat...
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| Main Authors: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2012
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3534491/ https://ncbi.nlm.nih.gov/pubmed/23171576 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-634 |
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